The of the vacuum piping significantly influences effective pumping speed at the chamber. In molecular flow (pressures below 10⁻³ Torr), conductance C for a circular tube can be approximated by:
Before trusting your spreadsheet, validate with: vacuum pump capacity calculation xls
Materials inside the vacuum chamber (rubber, plastic, metal) release gas. If the chamber is dirty or moist, the pump must be larger. The of the vacuum piping significantly influences effective
VACUUM PUMP CAPACITY CALCULATOR v1.0
Enter the application requirements in columns A to C, and use the following formulas to calculate the pump capacity: vacuum pump capacity calculation xls